Turbo Molecular Pump

Combination Bearings


Standard Specifications

Turbo molecular pump model TMP-B300
Cooling method Convection Forced air by cooling fan
Ultimate pressure(note 2) After baking (note 1) 10-8 Pa order (note 2)
Non-baking 10-6 Pa order 10-6 Pa order
Pumping speed(note 3) N2 280 L/s 280 L/s
He 270 L/s 270 L/s
H2 220 L/s 220 L/s
Compression ratio N2  > 1 x 109 > 1 x 109
He 7×106 7×106
H2  1×105 1×105
Critical backing pressure 1500 Pa 1500 Pa
Maximum allowable continuous
backing pressure(note 4)
N2  100 Pa
(ambient < 35°C)
1000 Pa
(ambient 25°C)
930 Pa
(ambient 35°C)
Maximum allowable gas throughput at
continuous pumping
(ambient 25°C)
(ambient 35°C)
100 SCCM
(ambient 25°C)
(ambient 35°C)
weight VG, ISO 6 kg 6.3 kg
ICF 9 kg 9.3 kg
Bearing type Passive magnetic bearing and ceramic bearing
Inlet flange VG100, DN100CF, ISO100K
Outlet port KF16
Rated speed 60000 rpm
Stat-up time(up to 80 %) 3.5 minutes
Mounting direction In any desired direction
Noise [Shimadzu's method](note 5) ≤ 50 dBA
Admissible ambient magnetic field Radial direction 3 mT
Axial direction 15 mT
Input electric power Voltage DC24 V ± 5 %
Maximum power 180 W

Open the table in a new window.

(Note 1) Only pumps equipped with a CF flange and cooling fan can be baked.
(Note 2) When using a two-stage oil-sealed rotary pump as an auxiliary pump.
(Note 3) When no protective net is used. Pumping speed for N2 is 260 L/s when a protective net is used.
(Note 4) Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min
(Note 5) Measured for the ISO flange model.

This page may contain references to products that are not available in your country. Please contact us to check the availability of these products in your country.

Product Inquiry Form