Evaluation of TOC of Sulfuric Acid using Wet Oxidation TOC Analyzer

User Benefits

- It is feasible to quantify low TOC content in 10 % sulfuric acid solution and thereby manage organic contamination within sulfuric acid solutions. - By using the auto-sampler, multiple samples can be automatically measured.

Introduction

Sulfuric acid is one of the chemicals used in the semiconductor industry for precision cleaning of surfaces such as wafers. When the cleaning solution is contaminated with organic impurities, it may not only affect the objects being cleaned but also the manufacturing process itself. Therefore, stringent quality control is imperative for the sulfuric acid utilized in the cleaning process. Organic impurities in sulfuric acid can be evaluated by measuring total organic carbon (TOC). The wet oxidation TOC analyzer, which is capable of high-sensitivity TOC measurement, is effective for managing trace organic substances required by the increasing complexity of integrated circuits. This article introduces an example of TOC measurement conducted with the Shimadzu wet oxidation total organic carbon analyzer TOC-V on a 10 % sulfuric acid solution.

6 de febrero de 2024 GMT