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    SPM-Nanoa - Specs

    Scanning Probe Microscope/Atomic Force Microscope

    Wide Assortment of Expansion Functionality

    SPM Unit

    Scanner

    Max. scanning size (X,Y,Z)
    10 μm x 10 μm x 1 μm (standard)
    30 μm x 30 μm x 5 μm (optional)
    125 μm x 125 μm x 7 μm (optional)
    55 μm x 55 μm x 13 μm (optional)
    2.5 μm x 2.5 μm x 0.3 μm (optional)

    Sample Stage

    Max. sample size
    ø50 mm x 8 mm
    For 50 mm diameter samples, only the central area can be observed

    Max. stroke
    ±5 mm
    When a 40 mm diameter or smaller sample is placed in the center of the scanner

    Optical Microscope Observation

    Total magnification rate
    About 220 to 1300 times
    (when maximum displayed on 21.5-inch monitor)

    Installation Specifications

    Installation Specifications

    [Installation Environment] Temperature

    23 °C ± 5 °C

    [Installation Environment] Relative Humidity

    60 % max. (with no condensation)

    [Power Supply] Single Phase

    100 to 240 V AC, 50/60 Hz, 15 A, one circuit

    [Power Supply] Ground

    Type-D ground (Grounding Resistance: 100 max.)

    [Size and Weight of Units] Microscope Unit

    W220 × D370 × H520mm 24kg

    [Size and Weight of Units] Control Unit

    W190 × D400 × H440mm 14kg

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