Standard Specifications
| Turbo molecular pump model | TMP-B300 | ||
|---|---|---|---|
| Cooling method | Convection | Forced air by cooling fan | |
| Ultimate pressure(note 2) | After baking | −(note 1) | 10-8 Pa order (note 2) |
| Non-baking | 10-6 Pa order | 10-6 Pa order | |
| Pumping speed(note 3) | N2 | 280 L/s | 280 L/s |
| He | 270 L/s | 270 L/s | |
| H2 | 220 L/s | 220 L/s | |
| Compression ratio | N2 | > 1 x 109 | > 1 x 109 |
| He | 7×106 | 7×106 | |
| H2 | 1×105 | 1×105 | |
| Critical backing pressure | 1500 Pa | 1500 Pa | |
| Maximum allowable continuous backing pressure(note 4) |
N2 | 100 Pa (ambient < 35°C) |
1000 Pa (ambient 25°C) 930 Pa (ambient 35°C) |
| Maximum allowable gas throughput at continuous pumping |
10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C) |
100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C) |
|
| weight | VG, ISO | 6 kg | 6.3 kg |
| ICF | 9 kg | 9.3 kg | |
| Bearing type | Passive magnetic bearing and ceramic bearing | ||
| Inlet flange | VG100, DN100CF, ISO100K | ||
| Outlet port | KF16 | ||
| Rated speed | 60000 rpm | ||
| Stat-up time（up to 80 %） | 3.5 minutes | ||
| Mounting direction | In any desired direction | ||
| Noise [Shimadzu's method](note 5) | ≤ 50 dBA | ||
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Input electric power | Voltage | DC24 V ± 5 % | |
| Maximum power | 180 W | ||
- (Note 1)Only pumps equipped with a CF flange and cooling fan can be baked.
- (Note 2)When using a two-stage oil-sealed rotary pump as an auxiliary pump.
- (Note 3)When no protective net is used. Pumping speed for N2 is 260 L/s when a protective net is used.
- (Note 4)Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min
- (Note 5)Measured for the ISO flange model.
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