Standard Specifications
| Turbo molecular pump | TMP-X3405LMTC | |
|---|---|---|
| Inlet flange | VG300 / ISO320B / VG350 | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate (Note 1) |
800 mL/min (Note 2) (Pump's set temperature : 65 degrees C.) |
|
| Maximum allowable inlet pressure (N2 continuous exhaust) (Note 1) |
40 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust) (Note 1) |
270 Pa | |
| Pumping speed (Note 3) |
N2 | 3200 L/s |
| Ar | 3100 L/s | |
| H2 | 2150 L/s | |
| Compression ratio | N2 | 2 x 108 |
| H2 | 2 x 103 | |
| Rated speed | 27600 rpm | |
| Start-up time | 12 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.05 µm or less (0-peak) | |
| Recommended pumping speed of backing vacuum pump in case of gas purge | 2000 L/min or more | |
| Display | LED | POWER / ROTATION / TEMP.CONTROL / ALARM |
| Communication | Contact |
REMOTE (D-sub 25 pin female, Screw lock size UNC 4-40) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / NORMAL / ACC. / BRAKE / REMOTE / TEMP.STABLE / ALARM / WARNING |
| Serial | RS-232C / RS-485 | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed (set as 0.1 %). | |
| Water | Flow rate | 3 L/min or more |
| Pressure | 0.2 to 0.4 MPa | |
| Temperature | 19 to 30 degrees C. (above dew point) | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
| Maximum power | 2.1 kVA | |
| Mass | 89 kg | |
- (Note 1)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
- (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
- (Note 3)Without a protective net. Pumping speed for N2 is 2900 L/s with a protective net.
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