Standard Specifications
| Turbo molecular pump | TMP-V2304LM | |
|---|---|---|
| Inlet flange | VG250 / ISO250B | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate (Note 1) |
600 mL/min (Note 2) | |
| Maximum allowable inlet pressure (N2 continuous exhaust) (Note 1) |
4.5 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust) (Note 1) |
200 Pa | |
| Pumping speed (Note 3)(Note 4) |
N2 | 2100 L/s |
| Ar | 2000 L/s | |
| Compression ratio | N2 | 1×108 or more |
| He | 5×103 | |
| H2 | 9×102 | |
| Rated speed | 33700 rpm | |
| Start-up time | 9 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | |
| Recommended pumping speed of backing pump in case of gas purge |
1500 L/min or more | |
| Display | LED | POWER / STATUS / ROTATION / NET |
| Communication | Contact |
REMOTE (D-sub 37 pin female, Screw lock size M2.6) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION |
| Serial | RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6) | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Water | Flow rate | 3 to 4 L/min |
| Pressure | 0.2 to 0.4 MPa | |
| Temperature | 19 to 30 degrees C. (above dew point) | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
| Maximum power | 1.2 kVA | |
| Mass | 56 kg | |
- (Note 1)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
- (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
- (Note 3)Without a protective net. Pumping speed for N2 is 1950 L/s with a protective net.
- (Note 4)Do not use corrosive gas because there is possibility that the pump breaks down by the product material.
This page may contain references to products that are not available in your country. Please contact us to check the availability of these products in your country.