Standard Specifications
Pump Main Unit
| Turbo molecular pump | TMP-203LM | TMP-203LMC | TMP-203M | TMP-203MC | |
|---|---|---|---|---|---|
| Inlet flange | VG100 / ICF152 / ISO100B / ISO100C | ||||
| Outlet flange | KF25 | ||||
| Cooling method | Water | Cooling fan | |||
| Ultimate pressure (after baking) (Note1) |
10-8 Pa order | 10-7 Pa order | 10-8 Pa order | 10-7 Pa order | |
| Maximum allowable inlet pressure (N2 continuous exhaust) |
200 Pa | 1.3 Pa | |||
| Maximum allowable outlet pressure | 400 Pa | 40 Pa | |||
| Pumping speed (Note 2) |
N2 | 190 L/s | |||
| He | 140 L/s | ||||
| H2 | 120 L/s | ||||
| Compression ratio | N2 | 1 x 109 | |||
| He | 6 x 104 | ||||
| H2 | 4 x 103 | ||||
| Rated speed | 50000 rpm | ||||
| Start-up time | 5 minutes or less | ||||
| Mounting position | In any desired direction | ||||
| Bake-out temperature at an inlet flange | 120 degrees C. or less | ||||
| Vibration level (by Shimadzu's method) | 0.012 µm or less (0-peak) | ||||
| Recommended flow rate of purge gas | 20 to 30 mL/min (Note 3) | ||||
| Recommended pumping speed of backing pump in case of gas purge | 200 L/min or more | ||||
| Environmental Temperatures | 0 to 40 degrees C. | ||||
| Admissible ambient magnetic field |
Radial direction | 3 mT | |||
| Axial direction | 15 mT | ||||
| Water | Flow rate | 1 to 3 L/min | - | ||
| Pressure | 0.2 to 0.5 MPa | ||||
| Temperature | 5 to 30 degrees C. | ||||
| Mass | 9 kg | ||||
- (Note 1)When using a metal gasket at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
- (Note 2)Without a protective net. Pumping speed for N2 is 180 L/s with a protective net.
- (Note 3)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)
Power Supply Unit
| Power supply unit | EI-S04M | |
|---|---|---|
| Battery | Not Necessary | |
| Exchangeable compatibility | The control cable and the fan cable are interchangeable between any pump and power supply unit. | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Communication | Contact |
REMOTE (MR-34) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING |
| Serial |
Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6) Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6) |
|
| Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) |
| Relative humidity | 40 to 80 %RH | |
| Input electric power | Voltage | Single phase 100 to 120 VAC ± 10 % (50/60 Hz ± 2 Hz) |
| Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) | ||
| Maximum power | 450 VA | |
| Mass | 8 kg | |
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