Standard Specifications
Pump Main Unit
| Turbo molecular pump | TMP-1503LM | TMP-1503LMC | |
|---|---|---|---|
| Inlet flange | VG250 / ICF305 / ISO250B | ||
| Outlet flange | KF40 | ||
| Cooling method | Water | ||
| Ultimate pressure (after baking) (Note1) |
10-8 Pa order | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate | 500 mL/min (Note 2) |
800 mL/min | |
| Maximum allowable inlet pressure (N2 continuous exhaust) |
133 Pa | ||
| Maximum allowable outlet pressure | 270 Pa | ||
| Pumping speed (Note 2) |
N2 | 1500 L/s | |
| He | 1200 L/s | ||
| H2 | 800 L/s | ||
| Compression ratio | N2 | 6 x 108 | |
| He | 1 x 104 | ||
| H2 | 1 x 103 | ||
| Rated speed | 30300 rpm | ||
| Start-up time | 7 minutes or less | ||
| Mounting position | In any desired direction | ||
| Bake-out temperature at an inlet flange | 120 degrees C. or less | ||
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | ||
| Recommended flow rate of purge gas | 20 to 30 mL/min (Note 3) | ||
| Recommended pumping speed of backing pump in case of gas purge | 600 L/min or more | ||
| Environmental Temperatures | 0 to 40 degrees C. | ||
| Admissible ambient magnetic field |
Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Water | Flow rate | 1 to 3 L/min | |
| Pressure | 0.2 to 0.5 MPa | ||
| Temperature | 5 to 30 degrees C. | ||
| Mass | 42 kg | ||
- (Note 1)When using a metal gasket at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
- (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
- (Note 3)Without a protective net. Pumping speed for N2 is 1380 L/s with a protective net.
Power Supply Unit
| Power supply unit | EI-R04M | |
|---|---|---|
| Battery | Not Necessary | |
| Exchangeable compatibility | The control cable and the motor cable are interchangeable between any pump and power supply unit. | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Communication | Contact |
REMOTE (MR-34) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING |
| Serial |
Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6) Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6) |
|
| Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) |
| Relative humidity | 40 to 80 %RH | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) |
| Maximum power | 1.0 kVA | |
| Mass | 8 kg | |
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