Standard Specifications
Pump Main Unit
| Turbo molecular pump | TMP-3304LM | TMP-3304LMC | |
|---|---|---|---|
| Inlet flange | VG350 / VG300 / ISO320B | ||
| Outlet flange | KF40 | ||
| Cooling method | Water | ||
| Ultimate pressure (after baking) (Note1) |
10-7 Pa order | ||
| Maximum allowable Argon gas flow rate | 1500 mL/min (Note 1) |
1900 mL/min | |
| Maximum allowable inlet pressure (N2 continuous exhaust) |
40 Pa | ||
| Maximum allowable outlet pressure | 270 Pa | ||
| Pumping speed (Note 2) |
N2 | 3200 L/s | |
| Ar | 3100 L/s | ||
| H2 | 2200 L/s | ||
| He | 3100 L/s | ||
| Compression ratio | N2 | 1 x 109 or more | |
| He | 1 x 105 | ||
| H2 | 6 x 103 | ||
| Rated speed | 27600 rpm | ||
| Start-up time | 12 minutes or less | ||
| Mounting position | In any desired direction | ||
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | ||
| Recommended flow rate of purge gas | 30 mL/min (Note 1) | ||
| Recommended pumping speed of backing pump in case of gas purge | 1500 L/min or more | ||
| Environmental Temperatures | 0 to 40 degrees C. | ||
| Admissible ambient magnetic field |
Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Water | Flow rate | 2 to 4 L/min | |
| Pressure | 0.2 to 0.5 MPa | ||
| Temperature | 5 to 25 degrees C. | ||
| Mass | Maximum 84 kg | ||
- (Note 1)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)
- (Note 2)Without a protective net. Pumping speed for N2 is 2900 L/s with a protective net.
Power Supply Unit
| Power supply unit | EI-R04M | |||||||
|---|---|---|---|---|---|---|---|---|
| Battery | Not Necessary | |||||||
| Exchangeable compatibility | The control cable is interchangeable between any pump and power supply unit. | |||||||
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |||||||
| Communication | Contact | REMOTE (MR-34)
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| Serial |
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| Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) | ||||||
| Relative humidity | 40 to 80 %RH | |||||||
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) | ||||||
| Maximum power | 1.5 kVA | |||||||
| Mass | 8 kg | |||||||
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