The semiconductor market is a core sector that drives technological advances. Semiconductors play an essential role in a wide range of industries, including automobiles, communications, and consumer electronics, with demand continuing to increase, mainly due to developments in IoT and AI technologies. Semiconductors are indispensable in a wide range of products and are an important factor in enriching our daily lives. They also provide the foundation for supporting modern technological innovation and achieving rapid growth. Shimadzu supplies high-quality turbomolecular pumps that increase the accuracy and efficiency of semiconductor manufacturing and facilitate industry development by offering optimized products.
Representative Products
TMP-5305LMTF
Excellent Pumping Performance, Leading Pumping Speed in the Industry, By-Product-Resistant
- Realized the maximum allowable argon gas throughput of 4000 SCCM. Achieved a 30 % improvement in performance over conventional pumps.
- Realized highest pumping speed for etching process by increasing the speed 20% over conventional models.
- The rotor coating and pump temperature control enabled the pumps fully protectable against by-products
TMP-2814LMAD
Improvement of by-product resistance due to high temperature
Related Products
- TMP-4304LMTF
- TMP-4324LMAD
- TMP-3304LMTF