Standard Specifications of Pump
| Turbo molecular pump | TMP-5305LMC | TMP-5305LMTC | |
|---|---|---|---|
| Inlet flange | VG400 / ISO400B | ||
| Outlet flange | KF63 | ||
| Cooling method | Water | ||
| Ultimate pressure (after baking) | 10-7 Pa order | ||
| Maximum allowable Argon gas flow rate | 2250 mL/min (Note 1,2) | 1000 mL/min（Set temperature：65 ℃） (Note 1,4) | |
| Maximum allowable inlet pressure | 15 Pa | ||
| Maximum Outlet Pressure During Continuous Operation | 270 Pa | ||
| Pumping speed (Note 3) | N2 | 5300 L/s | |
| Ar | 5100 L/s | ||
| H2 | 3200 L/s | ||
| Compression ratio | N2 | 3×108 | |
| H2 | 2×103 | ||
| Rated speed | 20580 rpm | ||
| Start-up time | 12minutes | ||
| Mounting position | Only in the vertical direction. | ||
| Vibration level (by Shimadzu's method) | 0.01 μm or less（single amplitude） | ||
| Recommended flow rate of purge gas (Note 1) | 30 ～ 100 mL/min | ||
| Recommended pumping speed of backing pump in case of gas purge | 10000 L/min or more | ||
| Set temperature | － | 65 ℃, 75 ℃ (Note 5) | |
| Environment temperature | 0 ～ 40 ℃ | 10 ～ 40 ℃ | |
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Water | Flow Rate | 4 ～ 6 L/min | |
| Pressure | 0.2 ～ 0.4 MPa | ||
| Temperature | 5 ～ 25 ℃ | 20 ～ 30 ℃ | |
| Mass | 160 kg | ||
- (Note 1)mL/min: volume flow rate at 0 degrees C., 1 atm (Compatible with SCCM).
- (Note 2)The maximum allowable flow rate depends on the gas type, the APC valve temperature, set temperature of the pump, the gas purge flow rate and outlet pressure.
- (Note 3)Without a protective net. Pumping speed for N2 is 4950 L/s with a protective net.
(Note 4)The maximum allowable flow rate depends on the gas type, the APC valve temperature, set temperature of the pump, the gas purge flow rate and outlet pressure. - (Note 5)This is the temperature at which the cooling water is turned ON by the valve for temperature control in the pump section, using the monitored values from the temperature sensor. The heater will turn ON/OFF at the set temperature - 1°C.
Standard Specifications of Power Supply Unit
| Power Supply | EI-A05M | EI-A05MT | |
|---|---|---|---|
| Battery | Unnecesssary | ||
| Temperature of pump temperature control | － | 65 ℃, 75 ℃ | |
| Combination Compatibility | Compatible combination of pump, power supply unit and control cable are available. | Compatible combination of pump, power supply unit, control cable and temperature control cable are available. | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. | ||
| Communication | Contact | REMOTE（MR-34） | |
| Input ：START / STOP / RESET / LOW SPEED | |||
| Output ：ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING | Output ：ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / TEMP.STABLE | ||
| Serial | Front panel：RS-232C（D-sub 9 pin male, Screw lock size M2.6） | ||
| Rear panel：RS-485（D-sub 9 pin male, Screw lock size M2.6）（Two wire type. ） | |||
| Option：EtherCAT | |||
| Permissible Ambient Conditions | Temperature | During Operation 0 ～ 45 ℃（No condensation is necessary condition. ） | |
| Humidity | 40 ～ 80 %RH | ||
| Input electric power | Voltage | Single phase AC 200 ～ 240 V（50 / 60 Hz） | |
| Maximum power | 2.4 kVA | 3.3 kVA | |
| Mass | 9 kg | ||