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Shimadzu Review 78[1・2] (2021)
Abstract
Shimadzu developed ball-bearing type turbomolecular pumps (TMPs) for the analytical and measuring instruments market, general vacuum industry market, and academia/research center market, releasing the TMP-B300 in 2014 and the TMP-B70 in 2017. In the case of mass spectrometers equipped with ball-bearing type TMPs, multiple vacuum chambers must be evacuated separately using a differential exhaust system. To reduce the instrument cost and minimize risks of system stoppage due to a TMP failure, rather than connecting a separate TMP to each vacuum chamber, systems are typically configured with one TMP unit for evacuating multiple chambers. To enable differential pumping, TMPs with multiple inlets are used, such as dual-inlet, multi-inlet, or split-flow types. This article describes the TMP-BD200, a ballbearing type TMP with two inlets developed for mass spectrometers (mainly gas chromatograph mass spectrometers).
1Turbo Molecular Pump Business Unit, Industrial Machinery Division, Shimadzu Corporation, Kyoto, Japan
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