If using a turbomolecular pump in any of the processes or environments listed below, restrictions on use or periodic overhauls may be required, depending on the operating conditions. If such restrictions or requirements are a possibility, contact Shimadzu in advance.
- Pumping special gases that contain gallium
- Pumping reactive, corrosive, or toxic gas
- Using the pump where it is exposed to significant vibration or impacts
- Installing the pump in locations where there are strong magnetic fields
- Using the pump in a location exposed to radiation
- Installing the pump in locations where it will be directly exposed to plasma irradiation
- Using the pump in equipment that handles high voltages
- Frequently releasing the pressure to atmospheric air (which may occur due to emergency stops, power outages, or other non-standard sequences)
- Fixing the pump to a movable part of the equipment
For questions or clarifications, feel free to contact the following service help desk.