Turbo Molecular Pumps (TMP) create the vacuum environment that is indispensable for the manufacturing processes of solar cells and semiconductors. Boasting the highest level of exhaust capacity in the world, Shimadzu's product lineup is designed to meet the layer deposition and fabrication requirements of solar cell modules and silicon wafers, both of which are becoming increasingly large.
Lineup by Type
Magnetic Bearings Turbo Molecular Pump
Types with Integrated Power Supply Type
V Series
- No need to install cables or use a control rack
- Compact
- Energy-saving
X Series
- More Compactly
- Temperature control function
- IP54 compliant
- Energy-saving
Separate Power Supply Type
- Network connection enable
- Various monitoring functions
- Coupling-Free
- Wide ranges lineup
Combination Bearings Turbo Molecular Pump
Types with Integrated Power Supply Type
- Low vibration and long lifespan through magnetic bearings and ceramic bearings.
- High backpressure and hydrogen compression ratio
- Energy-saving
- Can be mounted in any orientation.
Lineup by Model
Combination Bearings Turbo Molecular Pump
TMP-B series
TMP-B300
TMP-B70
Power Supply Display unit
EI-DPS240
Magnetic Bearings Turbo Molecular Pump
Lineup by Application
| Flange diameter(mm) | ≦100 | 150 | 200 | 250 | 300 | 350 | 400 | |
|---|---|---|---|---|---|---|---|---|
| Application | Type | |||||||
| CVD、 Etching |
Large capacity chemical type |
|
X4304 |
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Etching |
Reaction product compatible type |
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|
Ion implantation |
Wide range water cooling |
X4304 |
5305 |
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|
PVD, |
Air cooling type |
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Wide range air cooling type |
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| Energy saving, pumping system |
High backpressure chemical type |
W2404 LMC |
W3503 LMC |
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Ultra-high vacuum pumping |
High compression ratio type |
H3153 |
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