Main model
TMP-5305
Feature：
- Response to Reaction Byproducts
We have comprehensive pump protection measures including rotor surface treatment, pump temperature control, and dynamic seals in place for reaction byproducts generated during semiconductor etching and LCD etching. (For detailed specifications, please contact us separately.) - Support for New Field Network
The controller EI-A05 series for TMP-5305 supports RS-232C,RS-485 serial communication and EtherCAT communication. With these communication features, it allows for the start/stop of the TMP, as well as monitoring of operating conditions and reading of operational record.
Overwhelming Exhaust Flow Rate
4000 SCCM as the allowable flow rate for Ar and 30% performance improvement over conventional turbo molecular pumps have been achieved.
Highest Exhaust Speed in Industry field.※
Exhaust speed has been improved by 20% compared to conventional models, it achieved to the highest exhaust speed for etching processes. This pump is ideal for device manufacturing, which is advancing in miniaturization and multilayering.
- ※For etching process (research by Shimadzu)
TMP-04 series
Despite its compact and simple design, it offers excellent exhaust performance and high energy efficiency. This high-capacity exhaust series can continuously exhaust large amounts of gas stably. This is usable over a wide pressure range.
Features：
- Response to Reaction Byproducts
We have comprehensive pump protection measures including rotor surface treatment, pump temperature control, and dynamic seals in place for reaction byproducts generated during semiconductor etching and LCD etching. (For detailed specifications, please contact us separately.)
Improvement of Exhaust Performance
For vacuum processing applications of ∅300mm wafers and large LCD substrates, the exhaust speed in the 1 to 5 Pa range has been improved significantly compared to conventional models. This allows to fill larger gas flow while maintaining vacuum levels.
Compact and high performance
Two types of power supplies cover the pumps in the 03 series and 04 series. Additionally, even if the combinations of the pump, power supply, and cables (ranging from 3 to 30 meters) is changed, they can operate without the need for adjustment.
Lineup of Separate Power Supply Type
| TMP-03 series |
TMP-04 series |
TMP-05 series |
|
|---|---|---|---|
| Separate Power Supply Type |