Magnetic Bearings Turbo Molecular Pump, Integrated Power Supply Type

Main model

TMP-X05 series

 

Feature:

  • Compact
    About 15% reduction of the height dimension compared to the conventional integrated power supply TMP-V3304
  • Energy-saving
    About 15% reduction compared to the conventional separate power supply
  • Various communication networks and local operation
    Equipped with temperature adjustment functionality, it enhances motor drive output, making it suitable for processes involving reaction products and corrosive gas.
TMP-X05シリーズ

Improvement of exhaust performance

By applying rarefied gas flow analysis and structural analysis techniques, we have achieved high-efficiency exhaust and attained further improvement in exhaust performance.

Improvement of exhaust performance

 

Network connection

Equipped with RS-232C and RS-485 compliant serial communication ports, it allows for the start/stop of the TMP, as well as monitoring of operating conditions and reading of operational record. With the optional monitoring software, up to 32 TMPs can be monitored from a single computer via RS-485 communication. A Profibus communication option is also available.

Network connection

Lineup by Series

Table head TMP-V04
series
TMP-X05
series

Types with Integrated Power Supply Type

TMP-V1704

TMP-V2304

TMP-V2804

TMP-V3304(0)

TMP-V4404

TMP-X1205

TMP-X1605

TMP-X2905

TMP-X3405