標準仕様
| Turbo molecular pump | TMP-X3405LMC | TMP-X3405LMTC | |
|---|---|---|---|
| Inlet flange | VG300 / ISO320B / VG350 | ||
| Outlet flange | KF40 | ||
| Cooling method | Water | ||
| Ultimate pressure (after baking) | 10-7 Pa order | ||
| Maximum allowable Argon gas flow rate | 1300 mL/min (Note 1, Note 2) | 800 mL/min（Set temperature：65 ℃） (Note 1, Note 4) | |
| Maximum allowable inlet pressure (N2 continuous exhaust) | 40 Pa | ||
| Maximum allowable outlet pressure (N2 continuous exhaust) |
270 Pa | ||
| Pumping speed (Note 3) | N2 | 3400 L/s | |
| Ar | 3300 L/s | ||
| H2 | 2300 L/s | ||
| Compression ratio | N2 | 2×108 | |
| H2 | 1×103 | ||
| Rated speed | 27600 rpm | ||
| Start-up time | 12 minutes or less | ||
| Mounting position | In any desired direction | ||
| Vibration level (by Shimadzu's method) |
0.05 μm or less（single amplitude） | ||
| Set Temperature for Control | - | 65 ℃, 75 ℃ (Note 5) | |
| Recommended flow rate of purge gas (Note 1) | 30 mL/min | 30 ～ 100 mL/min | |
| Recommended pumping speed of backing pump in case of gas purge | 2000 L/min or more | ||
| Environment temperature | 10 ～ 40 ℃ | ||
| Admissible ambient magnetic fie | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Water | Flow Rate | 3 L/min or more | |
| Pressure | 0.2 ～ 0.4 MPa | ||
| Temperatur | 19 ～ 30 degrees C.(above dew point) | ||
| Displa | LED | POWER / ROTATION / ALARM | POWER / ROTATION / TEMP.CONTROL / ALARM |
| Communication | Contact | REMOTE（D-sub 25 pin male, Screw lock size UNC 4-40） | |
| Input：START / STOP / RESET / LOW SPEED | |||
| Output：ROTATION/ NORMAL / ACCELERATION / BRAKE / REMOTE / ALARM / WARNING | Output：ROTATION/ NORMAL / ACCELERATION / BRAKE / REMOTE / TEMP.STABLE / ALARM / WARNING | ||
| Serial | RS-232C / RS-485（Two-wire） | ||
| Speed variat | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | ||
| Input electric power | Voltage | Single phase AC 200 ～ 240 V（50 / 60 Hz） | |
| Maximum power | 1.7 kVA | 2.1 kVA | |
| Mass | 89 kg | ||
- (Note 1)mL/min: volume flow rate at 0 degrees C., 1 atm (Compatible with SCCM).
- (Note 2)The maximum allowable flow rate depends on the gas type, the APC valve temperature, the gas purge flow rate and outlet pressure.
- (Note 3)Without a protective net. Pumping speed for N2 is 3000 L/s with a protective net.
- (Note 4)The maximum allowable flow rate depends on the gas type, the APC valve temperature, set temperature of the pump, the gas purge flow rate and outlet pressure.
- (Note 5)This is the temperature at which the cooling water is turned ON by the valve for temperature control in the pump section, using the monitored values from the temperature sensor. The heater will turn ON/OFF at the set temperature - 1°C.
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