Standard specifications
| Turbo molecular pump (Note 1) | TMP-X1205LM | ||
|---|---|---|---|
| Inlet flange | VG150 | ISO160B | |
| Outlet flange | KF40 | ||
| Ultimate pressure (after baking) | 10-7 Pa order | ||
| Maximum allowable Argon gas flow rate (Note 2, Note 3) | 850 mL/min | ||
| Maximum allowable inlet pressure (N2 continuous exhaust) |
28 Pa | ||
| Maximum allowable outlet pressure (N2 continuous exhaust) |
266 Pa | ||
| Pumping speed (Note 4) | N2 | 1080 L/s | 950 L/s |
| Ar | 1020 L/s | 890 L/s | |
| H2 | 710 L/s | 680 L/s | |
| Compression ratio | N2 | 2×108 | |
| H2 | 8×102 | ||
| Rated speed | 37200 rpm | ||
| Start-up time | 8 minutes or less | ||
| Mounting posit | In any desired direction | ||
| Vibration level (by Shimadzu's method) | 0.01 μm or less（single amplitude） | ||
| Recommended flow rate of purge gas (Note 2) | 30 mL/min | ||
| Recommended pumping speed of backing pump in case of gas purge | 600 L/min or more | ||
| Environment temperature | 10 ～ 40 ℃ | ||
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Water | Flow Rate | 3 L/min or more | |
| Pressure | 0.2～0.5 MPa | ||
| Temperatur | 19 ～ 30 degrees C.(above dew point) | ||
| Display | LED | POWER / NORMAL / ALARM | |
| Communication | Contact | REMOTE（D-sub 25 pin male, Screw lock size UNC 4-40） | |
| Input：START / STOP / RESET / LOW SPEED | |||
| Output：ROTATION / NORMAL / ACCELERATION / BRAKE / REMOTE / ALARM / WARNING | |||
| Serial | RS-232C / RS-485（Two-wire） | ||
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | ||
| Input electric power | Voltage | Single phase AC 200 ～ 240 V（50 / 60 Hz） | |
| Maximum power | 0.75 kVA | ||
| Mass | 43 kg | ||
- (Note 1)Do not use corrosive gas because there is possibility that the pump breaks down by the product material.
- (Note 2)mL/min: volume flow rate at 0 degrees C., 1 atm (Compatible with SCCM).
- (Note 3)The maximum allowable flow rate depends on the gas type, the APC valve temperature, the gas purge flow rate and outlet pressure.
- (Note 4)Without a protective net. Pumping speed for N2 is VG150：1020 L/s，ISO160B：900 L/s with a protective net.